Semiconductor, LCD fields
- Priority: constant dispensing performance
- ● The perfect discharge pump series when a high degree of repeat accuracy and linearity is required.
- Priority: constant volume, constant flow rate dispensing performance
- ● A series of discharge pumps that provide both the constant volume performance required for high repeat accuracy and linearity, and the constant volume performance required for a uniform film from the start to the end of deposition.
- Dispense unit
- ● Unit that enables batch control from the chemical bottle to the nozzle.